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Conferences > ECBO > 2011 > TA > 80910T

Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography

Gunay Yurtsever, Katarzyna Komorowska, and Roel Baets

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Abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

© 2011 OSA/SPIE

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