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Conferences > ECEOC > 2012 > Tu.1.E > Tu.1.E.2

High-Efficient CMOS-Compatible Grating Couplers with Backside Metal Mirror

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus

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Abstract

We present a grating coupler for efficient coupling between standard fibers and photonic integrated circuits realized in a CMOS fabrication process. The method introduces a backside metal mirror to the grating coupler without need of extensive wafer bonding. The structure exhibits high coupling efficiency of -1.6 dB near the wavelength 1550 nm.

© 2012 Optical Society of America

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