Wafer-scale fabrication of low-loss waveguides in lithium niobate on insulator (LNOI) integrated photonics platform

Jacopo Leo; Mozhgan Hayati; Farnaz Ebrahimi Agri; Zyad Haddad; Gregory Choong; Yves Petremand; Ivan Prieto; Olivier Dubochet; Michel Despont; Hamed Sattari; Amir Ghadimi

European Conference on Optical Communication (ECOC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper Mo3F.4

Wafer-scale fabrication of low-loss waveguides in lithium niobate on insulator (LNOI) integrated photonics platform

Jacopo Leo, Mozhgan Hayati, Farnaz Ebrahimi Agri, Zyad Haddad, Gregory Choong, Yves Petremand, Ivan Prieto, Olivier Dubochet, Michel Despont, Hamed Sattari, and Amir Ghadimi

European Conference and Exhibition on Optical Communication 2022

Basel Switzerland
18–22 September 2022
ISBN: 978-1-957171-15-9

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J. Leo, M. Hayati, F. E. Agri, Z. Haddad, G. Choong, Y. Petremand, I. Prieto, O. Dubochet, M. Despont, H. Sattari, and A. Ghadimi, "Wafer-scale fabrication of low-loss waveguides in lithium niobate on insulator (LNOI) integrated photonics platform," in European Conference on Optical Communication (ECOC) 2022, J. Leuthold, C. Harder, B. Offrein, and H. Limberger, eds., Technical Digest Series (Optica Publishing Group, 2022), paper Mo3F.4.

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Abstract

Here, we present a wafer scale fabrication for low-loss lithium niobate on insulator (LNOI) waveguides at C-band and statistical measurements of resonators, demonstrating quality factors exceeding 2.5 × 10⁶, corresponding to a waveguide loss below 0.14 dB/cm.

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