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  • European Conference on Optical Communication (ECOC) 2022
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper Mo3F.4

Wafer-scale fabrication of low-loss waveguides in lithium niobate on insulator (LNOI) integrated photonics platform

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Here, we present a wafer scale fabrication for low-loss lithium niobate on insulator (LNOI) waveguides at C-band and statistical measurements of resonators, demonstrating quality factors exceeding 2.5 × 106, corresponding to a waveguide loss below 0.14 dB/cm.

© 2022 The Author(s)

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