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Conferences > ECEOC > 2022 > We4E > We4E.3
  • European Conference on Optical Communication (ECOC) 2022
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper We4E.3

Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

Yisbel E. Marin, Arijit Bera, Matteo Cherchi, and Timo Aalto

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Abstract

We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip- waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing.

© 2022 The Author(s)

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