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Ultra-low-loss Single-mode Si3N4 Waveguides with 0.7 dB/m Propagation Loss

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Abstract

We report an approach to make ultra-low-loss waveguides using fixed-index-contrast stoichiometric Si3N4. A record low single-mode propagation loss of 0.70 ± 0.02 dB/m was achieved while multi-mode designs have fundamental mode loss as low as 0.43 ± 0.04 dB/m.

© 2011 Optical Society of America

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