Abstract

The understanding of power transfer, kinetics, and optical extraction in excimer lasers has improved dramatically in the past few years to the point where computer modeling can now aid in the design of new laser systems and accurately predict their performance. Modeling of laser experiments is a link between the basic physical data and observations on a specific device. Physical processes or energy pathways are incorporated into the model until all experimental observations are explained. In this regard, it is important that the diagnostics on a device are extensive enough to make the choice of a particular model unique. Kinetic models for some excimer lasers, such as KrF, XeCℓ and HgBr, are now sufficiently complete to form the basis for an accurate and comprehensive model of the laser system. Although the detailed kinetics in these lasers may not be completely understood, the processes which significantly affect device performance have been identified.

© 1983 Optical Society of America