Abstract

The generation of uniform 7×7cm² optical beams has been demonstrated both in KrF and XeCl lasers under the condition of strong pumping (3~4GW/ℓ) at a high gas pressure (~5atm), resulting in output energies of 5J in KrF and 13.8J in XeCl respectively. In KrF, the energy extraction during the almost entire pumping period (60ns) has been achived with Ne as a buffer gas, implying no serious build-up of absorption even under strong pumping as shown in XeCl.¹⁾ The improvement in discharge uniformity and extension of the optical pulse duration have been obtained by the peaking of the discharge current using a stray capacitance between the rail-gap and the laser head, as well as by the use of Ne rather than He as a buffer gas.²⁾ The effect of current rise time on discharge homogeneity is described. The preliminary results of triggered rail-gap is also described.

© 1983 Optical Society of America