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Optica Publishing Group
  • Topical Meeting on Excimer Lasers
  • Technical Digest Series (Optica Publishing Group, 1983),
  • paper MB5

High Average Power XeCl Laser

Open Access Open Access

Abstract

We report the results of an excimer laser development program resulting in an average power in excess of 180 watts at 400 Hz, with over one hour continuous operation.

© 1983 Optical Society of America

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