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Optica Publishing Group
  • Topical Meeting on Excimer Lasers
  • Technical Digest Series (Optica Publishing Group, 1983),
  • paper MC1

Cryogenic Gas Purification and Lifetime Extension of ArF, KrF and XeF Laser Gas Mixtures

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Abstract

One common problem encountered in the operation of rare gas halide lasers is limited gas lifetime. This is a problem with both commercial lasers and with home built development systems. Reactions between the halogen donor gas and the structural materials of the laser body create gaseous impurities. These impurities will not only absorb the laser photons but also block the preionizing VUV radiation causing discharge degradation. As the impurities build up the laser output declines and in order to return the laser to full power the gas mixture, in the past, has had to be replaced. We have developed a simple method of cryogenically removing the impurities without affecting the halogen donor or the rare gas. A very much extended gas fill lifetime results.

© 1983 Optical Society of America

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