Add to BibSonomyAbstract
We report the design, fabrication, and characterization of a monolithic nano-optomechanical silicon nitride transducer. Our system features a 1D photonic crystal cavity Qapprox105 integrated with a high-Q Q106 nanobeam with optomechanical cooperativity exceeding 103.
© 2021 IEEE
PDF ArticleMore Like This
A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4
Mohammad J. Bereyhi, Amirali Arabmoheghi, Nils J. Engelsen, and Tobias J. Kippenberg
FTh2P.6 CLEO: QELS_Fundamental Science (CLEO:FS) 2021
Mode shape engineering of silicon nitride nano-strings for quantum optomechanics
R. Schilling, A. Ghadimi, S. Fedorov, H. Schütz, V. Sudhir, and T. J. Kippenberg
ATu4B.6 CLEO: Applications and Technology (CLEO:A&T) 2017
High mechanical fMQM product tuning fork cavity optomechanical transducers
Rui Zhang, Chaoyang Ti, Marcelo Davanço, Yundong Ren, Vladimir Aksyuk, Yuxiang Liu, and Kartik Srinivasan
IT4B.5 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2015