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Conferences > EQEC > 2021 > eh_5 > eh_5_4
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper eh_5_4

Overcoming optical performance and diffusion issues in thermally tunable phase-change metasurfaces

Joe Shields, Carlota Ruiz de Galarreta, Jacopo Bertolotti, and C. David Wright

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Abstract

We experimentally demonstrate how thermally activated diffusion can irreversibly degrade the optical performance of thermally tunable phase-change material based metasurfaces to unacceptable levels, and validate a way to address such a fundamental issue via incorporating ultrathin Si3N4 barrier layers.

© 2021 IEEE

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