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Porous Silica Enrichment Films on Integrated Waveguides for Broadband Mid-IR Spectroscopic Trace Analysis

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Abstract

Germanium-on-Silicon waveguide chips coated with functionalized mesoporous silica were used for evanescent wave sensing of organic contaminants in gas and aqueous phase. Low ppm level LODs and fast response times pave the way for in-line monitoring.

© 2021 The Author(s)

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