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Conferences > ES > 2021 > EW5D > EW5D.4

Laser-spectroscopic HCl measurements in gas metrology

Javis A. Nwaboh, Zhechao Qu, Olav Werhahn, and Volker Ebert

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Abstract

Hydrogen Chloride (HCl) poses health concerns and initiates corrosion on surfaces with water, requiring process control measurements. We report on improved spectral line data and more accurate dTDLAS concentration measurements with 1-uncertainties of 1.5 %.

© 2021 The Author(s)

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