A new silicon based microelectromechanical resonator for photoacoustic gas sensing

W. Trzpil; J. Charensol; T. Seoudi; D. Ayache; E.I. Kniazeva; E.I. Kniazeva; A. Vicet; M. Bahriz

doi:10.1364/ES.2022.ETu4H.3

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)
Technical Digest Series (Optica Publishing Group, 2022),
paper ETu4H.3
•https://doi.org/10.1364/ES.2022.ETu4H.3

A new silicon based microelectromechanical resonator for photoacoustic gas sensing

W. Trzpil, J. Charensol, T. Seoudi, D. Ayache, E.I. Kniazeva, A. Vicet, and M. Bahriz

Optics and Photonics for Sensing the Environment 2022

Vancouver, British Columbia Canada
11–15 July 2022
ISBN: 978-1-957171-10-4

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Novel Technique for Environmental Sensing II (ETu4H)

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W. Trzpil, J. Charensol, T. Seoudi, D. Ayache, E. I. Kniazeva, A. Vicet, and M. Bahriz, "A new silicon based microelectromechanical resonator for photoacoustic gas sensing," in Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES), Technical Digest Series (Optica Publishing Group, 2022), paper ETu4H.3.

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Abstract

A new silicon based capacitive sensor is developed for photoacoustic gas detection. It is precisely designed to overcome damping losses and enhance signal-to-noise ratio. For methane detection, we obtained a limit of detection of 667 ppmv.

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