Abstract
We will discuss laboratory experiments in silicon-photonics developed for senior and graduate level students. The learning objectives for this laboratory includes basic microfabrication techniques in cleanroom, understanding design and process flow, fabrication and testing of silicon waveguides and Mach-Zehnder interferometers on a silicon-on-insulator (SOI) wafer. We will also discuss a typical team project outcomes and examples of experimental work and report by student group. Additionally, we will comment on student’s learning and skill set acquired through this introductory hands-on project-based silicon photonics class.
© 2019 SPIE, ICO, IEEE, OSA
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