Abstract
Physical-optics modeling of EUVL imaging is done with accurate descriptions of the illumination. Two EUVL optical systems are described in this paper: (1) a Schwarzchild camera, illuminated with a laser-plasma source (LPS) and a simple illuminator, and (2) a ring-field camera, illuminated with an LPS and a high-efficiency condenser.
© 1994 Optical Society of America
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