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Conferences > EUL > 1994 > TEO > TEO.177

Real-time, Sub-Micron Fluorescence Imaging of Extreme Ultraviolet Aerial Images

B. La Fontaine, A. A. MacDowell, Z. Tan, G. N. Taylor, D. L. White, D. M. Tennant, and O. R. Wood

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Abstract

A new technique using single crystal phosphors has been used to observe, in real time, soft x-ray images with features as small as 100 nm. This fluorescence imaging scheme takes advantage of the high fluorescence yield, high index of refraction, short absorption depth of extreme ultraviolet (EUV) light (λ~139Å) and excellent optical properties of single crystals activated with rare earth ions.

© 1994 Optical Society of America

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