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Preliminary investigation of an additive approach to the fabrication of precision aspheres

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Abstract

We report progress in the aspherization of precision optical substrates via deposition of graded period Mo/Si multilayer coatings using a masking technique. These preliminary results show good agreement between the measured and desired thickness profiles over 85% of the sample, however, thickness deviations of up to 7% are observed in the central area. The errors are attributed to misalignments of the mask relative to the substrate during deposition.

© 1996 Optical Society of America

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