Abstract

Supersonic gas jets are used to produce a source of large cluster laser plasma targets for extreme ultraviolet (EUV) generation without direct production of debris. EUV conversion efficiency measurements at a wavelength of 13.5 nm yield 58% of a solid gold target or 0.0026 J/eV/J_L. Multilayer-coated mirrors placed in proximity to the plasma exhibit 14% reflectance loss after the equivalent of 1.4 × 10⁸ pulses, an improvement by a factor of 10⁵× over unprotected solid target results and 100× over solid targets with extensive debris mitigation.

© 1996 Optical Society of America