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Feasibility of Various Discharge Configurations for High Intensity Lithium Vapor Discharge Source at 13.5 nm for EUVL

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Abstract

This study examines the possibility for two different discharge configurations to achieve the plasma conditions required for a lithium vapor discharge source operating at 13.5 nm. Due to the difficulties of working with a pure lithium vapor system, the experiments were carried out using noble gases. The results suggest that a lithium vapor capillary discharge could be a suitable configuration for an EUVL lamp.

© 1996 Optical Society of America

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