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A High-Resolution VUV Spectrometer with Electronic Parallel Spectral Detector

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Abstract

We demonstrate a new high resolution VUV spectrometer for applications in the range 50 to 800Å. The instrument is comprised of a laser-plasma VUV source, which provides continuum background illumination, a 1.5m grazing incidence spectrometer, and a 1024-channel VUV optical multichannel analyzer (VUV-OMA). The VUV-OMA is of new design, featuring a special resolution-enhanced channel electron multiplier array in an overall configuration chosen to optimize the spatial resolution of the detector while maintaning single-photoelectron sensitivity.

© 1984 Optical Society of America

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