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Conferences > EUVXRAY > 2016 > ET4A > ET4A.2

Tabletop Extreme Ultraviolet Reflection Mode Coherent Diffractive Imaging of Buried Structures

Giulia F. Mancini, Dennis F. Gardner, Elisabeth R. Shanblatt, Christina L. Porter, Michael Tanksalvala, Robert Karl, Charles Bevis, Henry Kapteyn, Margaret Murnane, and Daniel E. Adams

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Abstract

We demonstrate non-invasive, high-resolution non-destructive reflection mode imaging of nanostructures buried beneath 100 nm of visibly opaque aluminum using ptychographic coherent diffractive imaging with 29.1 nm extreme ultraviolet light produced by tabletop high harmonic source.

© 2016 Optical Society of America

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