Stepwise Development to Realize the High Power EUV-FEL Light Source

Ryukou Kato; Hiroshi Sakai; Kimichika Tsuchiya; Yasunori Tanimoto; Yosuke Honda; Tsukasa Miyajima; Miho Shimada; Norio Nakamura; Hiroshi Kawata

doi:10.1364/EUVXRAY.2020.ETh2A.2

OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS)
OSA Technical Digest (Optica Publishing Group, 2020),
paper ETh2A.2
•https://doi.org/10.1364/EUVXRAY.2020.ETh2A.2

Stepwise Development to Realize the High Power EUV-FEL Light Source

Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Norio Nakamura, and Hiroshi Kawata

Compact EUV & X-ray Light Sources 2020

Washington, DC United States
16–20 November 2020
ISBN: 978-1-943580-73-6

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Sources Based on Laser-driven Acceleration and Other Compact Sources I (ETh2A)

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R. Kato, H. Sakai, K. Tsuchiya, Y. Tanimoto, Y. Honda, T. Miyajima, M. Shimada, N. Nakamura, and H. Kawata, "Stepwise Development to Realize the High Power EUV-FEL Light Source," in OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS), L. Assoufid, P. Naulleau, M. Couprie, T. Ishikawa, J. Rocca, C. Haefner, G. Sansone, T. Metzger, F. Quéré, M. Ebrahim-Zadeh, A. Helmy, F. Laurell, and G. Leo, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper ETh2A.2.

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Abstract

A high repetition rate EUV-FEL is one of the promising candidates for the future high power EUV light source more than 1 kW for future lithography. The design work on the FEL light source and the stepwise development procedure have been proposed elsewhere. Last fiscal year, KEK obtained a funding entitled "New laser technology development for processing laser" from NEDO to develop the high average power mid-infrared FEL. This FEL corresponds to the important stepwise development for EUV-FEL, too. At the conference, the present status of the project and the relationship of the technical development between present mid-infrared FEL and EUV-FEL will be presented.

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