Quantitative nanoscale coherence tomography with extreme ultraviolet light

Silvio Fuchs; Silvio Fuchs; Felix Wiesner; Felix Wiesner; Martin Wunsche; Martin Wunsche; Jan Nathanael; Jan Nathanael; Johann J. Abel; Julius Reinhard; Julius Reinhard; Christian Rödel; Christian Rödel; Gerhard G. Paulus; Gerhard G. Paulus

doi:10.1364/EUVXRAY.2020.EW3A.3

OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS)
OSA Technical Digest (Optica Publishing Group, 2020),
paper EW3A.3
•https://doi.org/10.1364/EUVXRAY.2020.EW3A.3

Quantitative nanoscale coherence tomography with extreme ultraviolet light

Silvio Fuchs, Felix Wiesner, Martin Wunsche, Jan Nathanael, Johann J. Abel, Julius Reinhard, Christian Rödel, and Gerhard G. Paulus

Compact EUV & X-ray Light Sources 2020

Washington, DC United States
16–20 November 2020
ISBN: 978-1-943580-73-6

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Metrology and Other Applications (EW3A)

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S. Fuchs, F. Wiesner, M. Wunsche, J. Nathanael, J. J. Abel, J. Reinhard, C. Rödel, and G. G. Paulus, "Quantitative nanoscale coherence tomography with extreme ultraviolet light," in OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS), L. Assoufid, P. Naulleau, M. Couprie, T. Ishikawa, J. Rocca, C. Haefner, G. Sansone, T. Metzger, F. Quéré, M. Ebrahim-Zadeh, A. Helmy, F. Laurell, and G. Leo, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper EW3A.3.

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Abstract

We present nanoscale coherence tomography (XCT) in the extreme ultraviolet range driven by a high-harmonic generation (HHG) light source. Using a novel phase retrieval algorithm, XCT enables non-destructive, quantitative, cross-sectional imaging, of, e.g., semiconductor devices.

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