Cleaner than a Cleanroom: Using First Contact Polymers as a Path Towards Atomically Clean, Particle Free Surfaces for High Energy Laser and Compact EUV and X-ray Sources

James P. Hamilton; James P. Hamilton

doi:10.1364/EUVXRAY.2022.EW6A.4

Optica High-brightness Sources and Light-driven Interactions Congress 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper EW6A.4
•https://doi.org/10.1364/EUVXRAY.2022.EW6A.4

Cleaner than a Cleanroom: Using First Contact Polymers as a Path Towards Atomically Clean, Particle Free Surfaces for High Energy Laser and Compact EUV and X-ray Sources

James P. Hamilton

Compact EUV & X-ray Light Sources 2022

Budapest Hungary
21–25 March 2022
ISBN: 978-1-957171-06-7

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Applications-II Semiconductor and Material Science (EW6A)

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J. P. Hamilton, "Cleaner than a Cleanroom: Using First Contact Polymers as a Path Towards Atomically Clean, Particle Free Surfaces for High Energy Laser and Compact EUV and X-ray Sources," in Optica High-brightness Sources and Light-driven Interactions Congress 2022, Technical Digest Series (Optica Publishing Group, 2022), paper EW6A.4.

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Abstract

A family of peelable, residue-free Apply-Dry-Peel liquid polymer coatings that safely protect and clean surfaces were developed and tested by Lockheed, NASA, and Caltech/LIGO demonstrating atomic level cleanliness. Use in synchrotron optics should be feasible.

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