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Material-specific ptychographic imaging at 13.5 nm using a high-order harmonic source

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Abstract

We present a high-harmonic driven ptychographic EUV microscope operating at a wavelength of 13.5 nm. Sub-20 nm resolution is demonstrated and the accurate amplitude and phase images are harnessed to identify multiple materials of an integrated circuit.

© 2022 The Author(s)

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Material-specific imaging at the nanoscale using a 13.5 nm high-harmonic source

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