Abstract
We present a high-harmonic driven ptychographic EUV microscope operating at a wavelength of 13.5 nm. Sub-20 nm resolution is demonstrated and the accurate amplitude and phase images are harnessed to identify multiple materials of an integrated circuit.
© 2022 The Author(s)
PDF Article | Presentation VideoMore Like This
Wilhelm Eschen, Chang Liu, Daniel Penagos, Lars Loetgering, Robert Klas, Vittoria Schuster, Alexander Kirsche, Jens Limpert, and Jan Rothhardt
F4.4 Ultrafast Optics (UFO) 2023
C. Liu, W. Eschen, L. Loetgering, V. Schuster, R. Klas, A. Kirsche, L. Berthold, A. Iliou, M. Steinert, T. Pertsch, F. Hillmann, M. Krause, J. Limpert, and J. Rothhardt
CF1D.5 Computational Optical Sensing and Imaging (COSI) 2022
Dennis F. Gardner, Giulia F. Mancini, Michael Tanksalvala, Elisabeth R. Shanblatt, Xiaoshi Zhang, Benjamin R. Galloway, Christina R. Porter, Robert Karl-Jr., Charles Bevis, Margaret M. Murnane, Henry Kapteyn, and Daniel E. Adams
ATu4J.5 CLEO: Applications and Technology (CLEO:A&T) 2016