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Conferences > EUVXRAY > 2022 > JTh4A > JTh4A.5

Compact soft X-ray source for transmission cell microscopy

A. A. Samokhvalov, K. A. Sergushichev, S. I. Eliseev, A. A. Smirnov, T. P. Bronzov, D. V. Getman, E. P. Bolshakov, M. V. Timshina, and V. A. Burtsev

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Abstract

This work presents a soft X-ray source. The emission lines of argon Ar IX-4.87 nm and carbon CV-4 nm were obtained. The results can be used for transmission soft x-ray microscope development.

© 2022 The Author(s)

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