A Novel Selective Carrier Modulation Technique to Form a Planar Metal Oxide Metasurface

Kai Sun; Kai Sun; Wei Xiao; Wei Xiao; Ioannis Zeimpekis; Mirko Simeoni; Alessandro Urbani; Matteo Gaspari; Sandro Mengali; Ivano Indiveri; Behcet Alpat; Lars Kildebro; Javier Aizpurua; Dan Hewak; C.H. (Kees) de Groot; Otto L. Muskens

doi:10.1364/FLATOPTICS.2021.JTh4B.3

OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)
OSA Technical Digest (Optica Publishing Group, 2021),
paper JTh4B.3
•https://doi.org/10.1364/FLATOPTICS.2021.JTh4B.3

A Novel Selective Carrier Modulation Technique to Form a Planar Metal Oxide Metasurface

Kai Sun, Wei Xiao, Ioannis Zeimpekis, Mirko Simeoni, Alessandro Urbani, Matteo Gaspari, Sandro Mengali, Ivano Indiveri, Behcet Alpat, Lars Kildebro, Javier Aizpurua, Dan Hewak, C.H. (Kees) de Groot, and Otto L. Muskens

Flat Optics: Components to Systems 2021

Washington, DC United States
27 June–1 July 2021
ISBN: 978-1-943580-88-0

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Advanced Nanofabrication and Testing for Flat Optics I (Joint Flat Optics and OF&T) (JTh4B)

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K. Sun, W. Xiao, I. Zeimpekis, M. Simeoni, A. Urbani, M. Gaspari, S. Mengali, I. Indiveri, B. Alpat, L. Kildebro, J. Aizpurua, D. Hewak, C. H. (Kees) de Groot, and O. L. Muskens, "A Novel Selective Carrier Modulation Technique to Form a Planar Metal Oxide Metasurface," in OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT), F. Capasso, W. Chen, P. Dainese, J. Fan, J. DeGroote Nelson, F. Duerr, J. Rogers, J. Rolland, P. Clark, R. Pfisterer, H. Rehn, S. Thibault, M. Jenkins, D. Wook Kim, and N. Trela-McDonald, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper JTh4B.3.

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Abstract

Metasurface devices are conventionally fabricated by physically patterning the functional film. We demonstrated a novel fabrication technique to selectively modulate Al-doped ZnO carrier concentration of planar film and form a planar optical metasurface.

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