Just how far into the vacuum ultraviolet can we go ?

Ulf Griesmann

doi:10.1364/FTS.2001.FWC1

Fourier Transform Spectroscopy
OSA Trends in Optics and Photonics (Optica Publishing Group, 2001),
paper FWC1
•https://doi.org/10.1364/FTS.2001.FWC1

Just how far into the vacuum ultraviolet can we go ?

Ulf Griesmann

Fourier Transform Spectroscopy 2001

Coeur d'Alene, Idaho United States
ISBN: 1-55752-665-6

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Novel Concepts I (FWC)

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U. Griesmann, "Just how far into the vacuum ultraviolet can we go ?," in Fourier Transform Spectroscopy, A. Sawchuk, ed., Vol. 51 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2001), paper FWC1.

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Abstract

The drive by the semiconductor industry to reduce feature sizes in integrated circuits has led to a renewed research effort to improve optical materials for the vacuum ultraviolet. Ultraviolet optical materials research at NIST and its implications for Fourier transform spectrometry in the vacuum ultraviolet will be discussed.

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