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Conferences > FiO > 2003 > TuV > TuV5

Photoconductive Optically Driven MEMS Spatial Light Modulator utilizing a GaAs Substrate and Polymeric Membrane Mirror

K. Rathna, B. Haji-Saeed, D. Pyburn, R. Leon, S. K. Sengupta, M. Testorf, W. Goodhue, J. Khoury, A. Drehman, C. L. Woods, and J. Kierstead

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Abstract

The fabrication and characterization of an optically addressable deformable mirror spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. Interferometrically measured deformation data as a function of illumination, applied voltage and frequency is presented.

© 2003 Optical Society of America

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