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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FMP3
  • https://doi.org/10.1364/FIO.2004.FMP3

Optimal use of analog and binary lithography for planar-integrated free-space optics fabrication

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For the fabrication of planar-integrated free-space optical (PIFSO) systems binary or analog lithography-based techniques can be used. The optimal choice or combination depends on system parameters like the targeted functionality, efficiency, reliability, and production cost. Our discussion is based on theoretical and experimental work in the field of optical interconnects.

© 2004 Optical Society of America

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