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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FTuG30
  • https://doi.org/10.1364/FIO.2004.FTuG30

Modal pattern analysis of multimode interferometric sensors applied to fully integrated silicon-based chem/bio sensors

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A multimode, Mach-Zehnder, interferometric chem/bio sensor with sensitivity developed through modal pattern tracking and analysis is demonstrated on silicon. Simulated and experimental data, show that integrated structures of length <5000 pm together with modal analysis permit fully-integrated sensors with index sensitivities near 10-6 and methanol vapor sensitivities approaching 500 ppb.

© 2004 Optical Society of America

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