Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Linear and Chirped gratings on thin-film waveguides with Focused Ion-Beam milling

Not Accessible

Your library or personal account may give you access


Linear and chirped gratings with feature sizes 150-300 nm have been fabricated in hafnium oxide waveguides with focused ion beam milling. Focusing waveguide grating is a key element in a compact integrated optic micro-spectrometer.

© 2005 Optical Society of America

PDF Article
More Like This
Characterization of Bragg Gratings in Al2O3 Waveguides Fabricated by Focused Ion Beam Milling and Laser Interference Lithography

F. Ay, E. H. Bernhardi, L. Agazzi, J. D. B. Bradley, K. Wörhoff, M. Pollnau, and R. M. de Ridder
CMQ4 Conference on Lasers and Electro-Optics (CLEO:S&I) 2010

Fabrication of Photonic Crystal Membranes in Chalcogenide Glasses by Focused Ion Beam Milling

Darren Freeman, Steve Madden, Barry Luther-Davies, Christian Grillet, Ara A. Asatryan, Kokou Dossou, Michael A. Byrne, and Lindsay C. Botten
CME3 Conference on Lasers and Electro-Optics (CLEO:S&I) 2005

High Numerical-Aperture Microlens Fabricated by Focused Ion Beam Milling

Yi Chiu, Chien-Hsun Huang, and Ying-Chien Hsu
MC6 Optical Data Storage (ODS) 2007

Select as filters

Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.