Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement

Takamasa Suzuki; Masanori Ohida; Kazuhiro Yokoyama; Osami Sasaki

doi:10.1364/FIO.2005.JTuC7

Frontiers in Optics
OSA Technical Digest Series (Optica Publishing Group, 2005),
paper JTuC7
•https://doi.org/10.1364/FIO.2005.JTuC7

Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement

Takamasa Suzuki, Masanori Ohida, Kazuhiro Yokoyama, and Osami Sasaki

Frontiers in Optics 2005

Tucson, Arizona United States
16–21 October 2005
ISBN: 1-55752-797-0

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FiO/LS Poster Session I (JTuC)

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T. Suzuki, M. Ohida, K. Yokoyama, and O. Sasaki, "Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper JTuC7.

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Abstract

We proposed a stroboscopic two-wavelength interferometer that is applicable to step- height measurement under the large disturbance. We confirmed the measurement range of 2 and measurement repeatability of 6.4 nm for the rotating object.

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