Nanometrology Using Spatially-Variant Polarization

Qiwen Zhan

doi:10.1364/FIO.2006.FThP1

Frontiers in Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2006),
paper FThP1
•https://doi.org/10.1364/FIO.2006.FThP1

Nanometrology Using Spatially-Variant Polarization

Qiwen Zhan

Frontiers in Optics 2006

Rochester, New York United States
10–13 October 2006
ISBN: 1-55752-818-7

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Spatially Variant Polarization Fields, Polarized Speckle Patterns, Polarized Vortices and Polarization Aberrations III (FThP)

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Q. Zhan, "Nanometrology Using Spatially-Variant Polarization," in Frontiers in Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2006), paper FThP1.

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Abstract

We report the designs and implementations of microellipsometer as well as near-field scanning optical microscope using spatial polarization symmetry. Their applications in semiconductor metrology will be discussed.

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