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Conferences > FiO > 2008 > FMG > FMG4
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FMG4
  • •https://doi.org/10.1364/FIO.2008.FMG4

Ultra-High Quality Factor Microdisk Resonators for Chipscale Visible Integrated Photonics

Ehsan Shah Hosseini, Siva Yegnanarayanan, Mohammad Soltani, and Ali Adibi

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Abstract

Ultra-high-quality (Q>4×106) microdisk resonators are demonstrated in a Si3N4 platform at 655nm with curved in-plane coupling waveguides on a Si substrate. Critical coupling to different radial modes is demonstrated using pedestal layer to control coupling.

© 2008 Optical Society of America

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