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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThS7
  • https://doi.org/10.1364/FIO.2009.FThS7

Modifications in the optical properties of thin film oxides with annealing

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Abstract

We show that post-annealing of HfO2 and SiO2 thin films affects the absorption loss at 1 µm and the subpicosecond laser breakdown behavior. These effects are explained by modifications in the density of intrinsic defects and photo-induced defects, respectively.

© 2009 Optical Society of America

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