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Conferences > FiO > 2009 > FThU > FThU2
  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThU2
  • •https://doi.org/10.1364/FIO.2009.FThU2

On-Chip Woodpile Photonic Crystal for Light Localization and 3D Integrated Optics

Lingling Tang and Tomoyuki Yoshie

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Abstract

Simple fabrication method, which consists of two lithography and two etching processes, is utilized to construct woodpile photonic crystals in GaAs wafers. The developed resonator and waveguide designs enable 3D optical integration in semiconductor wafer.

© 2009 Optical Society of America

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