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Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices

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Buried As2S3 nano-waveguides with size down to 200 nm on silicon wafer are prepared. The fabricated waveguide and micro-ring cavity show excellent optical properties. Optical nonlinearity of the nano-waveguides is characterized as well.

© 2010 Optical Society of America

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