Indentation Size Effects in Multilayer Hafnia-Silica Thin Films

Karan Mehrotra; John C. Lambropoulos

doi:10.1364/FIO.2010.FThP1

Frontiers in Optics 2010/Laser Science XXVI
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper FThP1
•https://doi.org/10.1364/FIO.2010.FThP1

Indentation Size Effects in Multilayer Hafnia-Silica Thin Films

Karan Mehrotra and John C. Lambropoulos

Frontiers in Optics 2010

Rochester, New York United States
24–28 October 2010
ISBN:

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General Optical Instrumentation (FThP)

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K. Mehrotra and J. C. Lambropoulos, "Indentation Size Effects in Multilayer Hafnia-Silica Thin Films," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper FThP1.

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Abstract

An experimental study of indentation size effect (ISE) on HfO₂-SiO₂ multilayer thin films is presented. Decrease in hardness with increasing loads is observed using cube corner tip. Data is discussed using the model of Nix-Gao.

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