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Hybrid Integration of III-V and Si for Photonic Integrated Circuits

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Abstract

We review III-V on silicon-on-insulator (SOI) heterogeneous integration for the demonstration of lasers, suitable for inter-chip and intra-chip optical interconnects. A low temperature oxygen plasma enhanced bonding technology is used to realize the III-V/SOI integration. The realization of silicon AWG lasers, quantum well intermixed DFB lasers and micro ring lasers on the III-V/SOI material platform is discussed.

© 2010 Optical Society of America

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