Adaptive optical methods for parallelized laser fabrication

P. S. Salter; H. Al-Wakeel; A. Jesacher; M. J. Booth

doi:10.1364/FIO.2011.FTuM3

Frontiers in Optics 2011/Laser Science XXVII
OSA Technical Digest (Optica Publishing Group, 2011),
paper FTuM3
•https://doi.org/10.1364/FIO.2011.FTuM3

Adaptive optical methods for parallelized laser fabrication

P. S. Salter, H. Al-Wakeel, A. Jesacher, and M. J. Booth

Frontiers in Optics 2011

San Jose, California United States
16–20 October 2011
ISBN: 978-1-55752-917-6

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Three-Dimensional Structure Design, Fabrication, and Nanopatterning II (FTuM)

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P. S. Salter, H. Al-Wakeel, A. Jesacher, and M. J. Booth, "Adaptive optical methods for parallelized laser fabrication," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optica Publishing Group, 2011), paper FTuM3.

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Abstract

We develop adaptive optics for 3D laser microfabrication. Correction of focal depth induced aberrations and beam shaping are applied to fabrication of photonic structures. Adaptive multispot schemes are used for rapid parallel fabrication.

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