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CMOS Compatible Integration of Si/SiO2 Multilayer GRIN Lens Optical Mode-Size Converter to SOI-Based Waveguide

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Abstract

Vertical mode size transformation from 300nm-thick Si-waveguide to 6~7μm, coupling to standard single-mode fiber was demonstrated using CMOS-compatible Si/SiO2 multilayer on-chip GRIN lens (length~11.5μm). Multilayer GRIN lens to fiber coupling loss of 2.9dB was achieved.

© 2011 Optical Society of America

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