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Conferences > FiO > 2012 > FTu3A > FTu3A.7

Interferometric Mapping of Charge Carrier Modulation in CMOS ICs

Abdulkadir Yurt, Euan Ramsay, Chris Stockbridge, Yang Lu, M. Selim Unlu, and Bennett B. Goldberg

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Abstract

We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit.

© 2012 Optical Society of America

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