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Optically Actuated MEMS Deformable Mirror Device

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We propose a new design, with corresponding fabrication procedures and the operating theory, for a very low-power optically actuated deformable mirror device. The deformable mirror consists of an array of AlGaAs PIN photo detectors bonded onto a transparent substrate, along with thin film resistors, and a suspended membrane.

© 2012 Optical Society of America

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