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Mid-Infrared Opto-nanofluidic Slot-Waveguide for Label-free On-Chip Chemical Sensing

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Abstract

A mid-infrared sensor for label-free on-chip chemical detection was developed using an engineered nanofluidic channel consisting of a Si-liquid-Si slot-structure. A sensitivity with 75 times improvement was achieved compared to conventional evanescent-wave sensing.

© 2014 Optical Society of America

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