Abstract
Conventional lithography based micromachining methods often involves in complex facilities, templates and repeated mechanical alignments. In addition, majority of the batch micromachining processes are 2.5D. In a departure from classical cleanroom based process, this research is aimed to establish a cost-effective, high precision, true 3D micromachining method with high flexibility. Specifically, a combination of ultraprecision micromachining and high volume replication methods, such as microinjection molding and 3D photolithographic projection, and hot embossing were investigated.
© 2015 Optical Society of America
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