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Chalcogenide Glass Processing for Direct Laser Writing of 3D Nano-Structures

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Abstract

Multi-photon direct laser writing was used to photo-pattern nano-structures in thermally deposited glassy films of chalcogenide (ChG) clusters. Chemical composition, refractive index, and nano-structure morphology were characterized and related to ChG laser and etch processing.

© 2015 Optical Society of America

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