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Conferences > FiO > 2015 > FTh4F > FTh4F.4

Vertically Tapered Adiabatic Waveguide Mode Converters Fabricated with Digital Projection Photochemical Etching

Kaiyuan Wang, Chris Edwards, Xin Yu, Lonna D. Edwards, Shailendra N. Srivastava, and Lynford L. Goddard

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Abstract

We combine conventional planar semiconductor processing with gray-scale topography created by digital projection photochemical etching to fabricate adiabatic waveguide mode converters. Applications include efficient coupling to fiber or between planes of multi-layer photonic integrated circuits.

© 2015 Optical Society of America

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