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Conferences > FiO > 2016 > FF3G > FF3G.4

Polarization-sensitive Off-null Measurements Applied to Process Monitoring Using Focused Beam Scatterometry

Anthony Vella, Stephen Head, Thomas G. Brown, and Miguel A. Alonso

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Abstract

We present a scatterometry experiment for the simultaneous retrieval of multiple parameters of a subwavelength structure. The input beam is tailored with a spatially varying input polarization state to enhance the sensitivity of the measurement.

© 2016 Optical Society of America

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